3M Betapure CMP Series Filter Capsule CMP510C04LC06, 4 in, 6/Case
Hisco #:7000001854-31180
MFG #:7000001854
Item must be ordered in multiples of 1
Quantity | Price | Save |
---|---|---|
1 | 780.31 | |
3 | 763.84 | Save 2% |
Betapure™ CMP Filter Capsules are high capacity depth filters optimized for oxide and metal slurries used in chemical mechanical planarization (CMP) applications. Betapure CMP filters are composed of all-polypropylene components and feature a multi-zone graded-porosity design for the optimum level of particle classification.
The Graded Porosity Advantage
The Betapure™ CMP Series Filter Capsule offers a graded porosity media that removes particles in sequential size – starting with the larger particles and ending finally with the smallest ones. The outer layers of the media act as a pre-filter while the innermost sections filter small particulate.
By spreading the filtration throughout the depths of the media, the Betapure CMP Series FIlter Capsule makes effective use of the media, extending the filter’s service life and reducing the frequency of filter change-outs. The graded porosity design helps remove hard and soft gel contaminants.
Superior Reduction of Large Particle Counts
While effectively removing particulate of varying sizes, our Betapure™ CMP Series Filter Capsule also offers superior slurry classification. This is important because an effective slurry filter is designed to let particles of a specific size and smaller pass through unchanged while removing only the undesirable particles larger than that size.
Toward that end, this filter capsule also reduces large particle counts (LPC). LPC’s tend to accumulate over time when existing particles aggregate or gel. This undesirable process is fairly common during adverse shipping conditions, shearing, slurry drying, and interaction with other distribution loop components such as fittings tanks, piping, valves and pumps. If left unaddressed, LPC’s can scratch metal and inter-level dielectrics, potentially causing wafer defects.
The Betapure CMP Series Filter Capsule effectively reduces LPC’s that can cause equipment damage and potentially reduce yields, while maintaining the polishing characteristics of the slurry. The 100% polypropylene materials offer broad temperature and chemical compatibility, which provides durability throughout demanding process applications.
Quality Control and Product Support
At 3M Purification Inc., we are committed to providing products that consistently perform well. Every capsule is identified with a unique lot number, which allows for total product and components traceability. Every capsule is manufactured and double-bagged in a clean environment to provide superior downstream cleanliness out of the package.
Recommended Applications
Semiconductor
Oxide/Low-k dielectrics
Shallow Trench Isolation (STI)
Inter-level Dielectric (ILD)
Polysilicon
Tungsten and copper
Data Storage
Magnetic heads
Nickel and glass substrates
Data Transmission
Optical fiber
Compound Semiconductor
Light Emitting Diodes (LED)
- Graded porosity design for superior reduction of hard and soft gel contaminants
- Reduces large particle counts (LPC) that can cause equipment damage and decreased yields
- All-polypropylene depth filter capsules allow for broad chemical and temperature compatibility
- Package Quantity: 1 EACH
- Part Number: CMP510C04LC06
- Series: Betapure™ CMP Series
- Width: 3.85 in
Product Description
Betapure™ CMP Filter Capsules are high capacity depth filters optimized for oxide and metal slurries used in chemical mechanical planarization (CMP) applications. Betapure CMP filters are composed of all-polypropylene components and feature a multi-zone graded-porosity design for the optimum level of particle classification.
The Graded Porosity Advantage
The Betapure™ CMP Series Filter Capsule offers a graded porosity media that removes particles in sequential size – starting with the larger particles and ending finally with the smallest ones. The outer layers of the media act as a pre-filter while the innermost sections filter small particulate.
By spreading the filtration throughout the depths of the media, the Betapure CMP Series FIlter Capsule makes effective use of the media, extending the filter’s service life and reducing the frequency of filter change-outs. The graded porosity design helps remove hard and soft gel contaminants.
Superior Reduction of Large Particle Counts
While effectively removing particulate of varying sizes, our Betapure™ CMP Series Filter Capsule also offers superior slurry classification. This is important because an effective slurry filter is designed to let particles of a specific size and smaller pass through unchanged while removing only the undesirable particles larger than that size.
Toward that end, this filter capsule also reduces large particle counts (LPC). LPC’s tend to accumulate over time when existing particles aggregate or gel. This undesirable process is fairly common during adverse shipping conditions, shearing, slurry drying, and interaction with other distribution loop components such as fittings tanks, piping, valves and pumps. If left unaddressed, LPC’s can scratch metal and inter-level dielectrics, potentially causing wafer defects.
The Betapure CMP Series Filter Capsule effectively reduces LPC’s that can cause equipment damage and potentially reduce yields, while maintaining the polishing characteristics of the slurry. The 100% polypropylene materials offer broad temperature and chemical compatibility, which provides durability throughout demanding process applications.
Quality Control and Product Support
At 3M Purification Inc., we are committed to providing products that consistently perform well. Every capsule is identified with a unique lot number, which allows for total product and components traceability. Every capsule is manufactured and double-bagged in a clean environment to provide superior downstream cleanliness out of the package.
Recommended Applications
Semiconductor
Oxide/Low-k dielectrics
Shallow Trench Isolation (STI)
Inter-level Dielectric (ILD)
Polysilicon
Tungsten and copper
Data Storage
Magnetic heads
Nickel and glass substrates
Data Transmission
Optical fiber
Compound Semiconductor
Light Emitting Diodes (LED)
- Graded porosity design for superior reduction of hard and soft gel contaminants
- Reduces large particle counts (LPC) that can cause equipment damage and decreased yields
- All-polypropylene depth filter capsules allow for broad chemical and temperature compatibility
- Package Quantity: 1 EACH
- Part Number: CMP510C04LC06
- Series: Betapure™ CMP Series
- Width: 3.85 in
Technical Information
Item must be ordered in multiples of 1